Rta Command

rta- perform a rapid thermal annealing step

Synopsis

rta

• dwell.temp = <n>
• dwell.time = <n>
• start.temp = <n>
• ramp = <n>
• cool = <n>

dwell.temp

The annealing temperature to hold after ramp up in degrees Celsius.

dwell.time

Time (in minutes) to hold dwell temperature after ramp up.

start.temp

Starting temperature in degrees Celsius.

ramp

Temperature ramp up rate in degrees C per second.

cool

Cooling rate in degrees C per second.

Examples

A 1 min RTA at 750C, starting at about room temperature.

rta dwell.temp=750 dwell.time=1 start.temp=22 ramp=34.4 cool=8.3