Rta Command
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rta- perform a rapid thermal annealing step
Synopsis
rta
- dwell.temp = <n>
- dwell.time = <n>
- start.temp = <n>
- ramp = <n>
- cool = <n>
dwell.temp
The annealing temperature to hold after ramp up in degrees Celsius.
dwell.time
Time (in minutes) to hold dwell temperature after ramp up.
start.temp
Starting temperature in degrees Celsius.
ramp
Temperature ramp up rate in degrees C per second.
cool
Cooling rate in degrees C per second.
Examples
A 1 min RTA at 750C, starting at about room temperature.
rta dwell.temp=750 dwell.time=1 start.temp=22 ramp=34.4 cool=8.3