Model Development Solution: Difference between revisions
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Build a simple model for carbon diffusion in silicon. Use a constant diffusivity: Dc = 1.0 * exp(-3.5 / kT). Set the initial carbon profile to: Cc = 1.0e18 * exp(- (x-0.1)*(x-0.1) / 0.001 ) + 1.0e15 | |||
Build a simple model for carbon diffusion in silicon. Use a constant diffusivity: Dc = 1.0 * exp(-3.5 / kT) | |||
Set the initial carbon profile to: Cc = 1.0e18 * exp(- (x-0.1)*(x-0.1) / 0.001 ) + 1.0e15 | |||
Part 1: Diffuse the profile for 60min. at 900, 30min. at 1000, and 10min. at 1100C. Does it agree with what you expect from a simple estimated hand calculation? | Part 1: Diffuse the profile for 60min. at 900, 30min. at 1000, and 10min. at 1100C. Does it agree with what you expect from a simple estimated hand calculation? | ||
Latest revision as of 18:48, 6 May 2015
Build a simple model for carbon diffusion in silicon. Use a constant diffusivity: Dc = 1.0 * exp(-3.5 / kT). Set the initial carbon profile to: Cc = 1.0e18 * exp(- (x-0.1)*(x-0.1) / 0.001 ) + 1.0e15
Part 1: Diffuse the profile for 60min. at 900, 30min. at 1000, and 10min. at 1100C. Does it agree with what you expect from a simple estimated hand calculation?
Part 2: Modify the model so the diffusivity it proportional to carbon concentration / 1e16 . Run the same anneals – what happens qualitatively?
Results for Part 1:
At 900 Celsius for 60 mins:
At 1000 Celsius for 30 mins:
At 1100 Celsius for 10 mins:
Results for Part 2:
At 900 Celsius for 60 mins:
At 1000 Celsius for 30 mins:
At 1100 Celsius for 10 mins:
