Rta Command: Difference between revisions
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(Created page with "rta- perform a rapid thermal annealing step = Synopsis = ==rta== *dwell.temp = <n> *dwell.time = <n> *start.temp = <n> *ramp = <n> *cool = <n> ==dwell.temp== The annealing te...") |
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Latest revision as of 20:06, 24 October 2014
rta- perform a rapid thermal annealing step
Synopsis
rta
- dwell.temp = <n>
- dwell.time = <n>
- start.temp = <n>
- ramp = <n>
- cool = <n>
dwell.temp
The annealing temperature to hold after ramp up in degrees Celsius.
dwell.time
Time (in minutes) to hold dwell temperature after ramp up.
start.temp
Starting temperature in degrees Celsius.
ramp
Temperature ramp up rate in degrees C per second.
cool
Cooling rate in degrees C per second.
Examples
A 1 min RTA at 750C, starting at about room temperature.
rta dwell.temp=750 dwell.time=1 start.temp=22 ramp=34.4 cool=8.3