Oxide Command
This is from the old blue manual in our lab. may be outdated.
oxide - specify the oxidation parameters for wet and dry oxidations.
Synopsis
oxide
- Material Specification
- (dry|wet)
- [l.break=<n>][lin1.0=<n>][lin.l.e=<n>]
- [lin.h.0=<n>][lin.h.e=<n>][l.pdep=<n>]
- [p.break=<n>][par.l.0=<n>][par.l.e=<n>]
- [par.h.0=<n>][par.h.e=<n>][p.pdep=<n>]
- [henry=<n>][theta=<n>]
Description
This command can be used to specify the oxide growth parameters for reaction and diffusion of oxidant. Both dry and wet oxidation can be stored.
Material Specification
This parameter can be used to specify the material the parameters apply to. In general the command should apply to oxide or gas.
dry,wet
The type of oxidation data being specified. One of these two parameters must be specified.
l.break,lin.1.0,lin.h.0,lin.h.3,l.pdep
The linear reaction rate parameters (B/A in the Deal Grove model[32]). This model allows for a dual dependence. L.break specifies the temperature break point. The lin.l parameters specify an Arrhenius relationship below the break temperature and lin.h specify the rate above the break point. l.pdep specifies the dependence on pressure. The rate constant is multiplied by the pressure raised to the l.pdep power.
p.break,parl.0,parh.0,par.h.e.,p.pdep
The parabolic reaction rate parameters (B int eh Deal Grove model [32]). This model allows for a dual dependence. P.break specifies the temperature break point. The par.l parameters specify an Arrhenius relationship below the break temperature and par.h specify the rate above the break point. p.pdep specifies the dependence on pressure. The rate constant is multiplied by the pressure raised to the p.pdep power.
henry
This specifies Henry's gas constant for the oxidant int he gas stream. It is used to compute the gas boundary condition, and is linearly dependent on the pressure.
theta
This represents the number of oxidant particles which must be incorporated to form a unit of oxide.